HC Semitek orders AIXTRON's AIX 2800G4-TM and AIX G5+ C, enabling MOCVD solutions for the increasing demand for RGB Micro LEDs /Micro LED technology is a game changer for the display industry Micro LED technology is on the verge of revolutionizing the display industry. The market demand for self-emissive Micro LEDs in the primary colors (RGB: red, green and blue) begins to rise strongly. HC Semitek, a leading enterprise of the semiconductor technology, will use AIXTRONs Planetary Systems to meet the emerging market demand for Micro LED displays.

For this purpose, the Chinese chipmaker now relies on the AIX 2800G4-TM and AIX G5+ C MOCVD systems from AIXTRON SE, a leading provider of deposition equipment to the semiconductor industry. All AIX 2800G4-TM and AIX G5+ C tools will feature a configuration of 8x6 inches and have been shipped in Q4/2021. HC Semitek is positioning itself for Micro LED technology, a strong emerging market and game changer for the display industry.

This groundbreaking technology enables unmatched pixel resolution, superior display quality and more important much higher current efficacy than existing display technologies. To achieve these benefits, the next generation of LED displays will require millions of micron-range LEDs to be transferred onto one single display, which has urged LED suppliers to develop new mass transfer technologies. To enable this, large arrays of LED are taken directly from the processed LED wafers, making any upfront wafer binning or sorting of defective chips obsolete.

Consequently, it is essential that all epitaxial wafers produced have very tight wavelength distribution and very low level of defects on their surfaces, calling for innovative and new MOCVD approaches. The Planetary System of AIXTRON features a wafer-level control of the film surface temperature during the epitaxial process. This warrants a very accurate control of the Indium incorporation into the Multi-Quantum Wells, which will ultimately define the wavelength consistency among all produced wafers.

Cassette-to-cassette automation coupled with in-situ cleaning ensure that no particle will contaminate the films during handling or the epitaxy processing.