Share ownership Axcelis Technologies, Inc.

Axcelis Technologies, Inc. designs, manufactures and services ion implantation and other processing equipment used in the fabrication of semiconductor chips. The Company offers a complete line of high energy, high current and medium current implanters for all application requirements. In addition to equipment, the Company provides extensive aftermarket lifecycle products and services, including used tools, spare parts, equipment upgrades, maintenance services and customer training. Its Purion flagship systems are all based on a common platform, which enables a combination of implant purity, precision and productivity. Combining a single wafer end station, with advanced spot beam architectures (that ensures all points across the wafer see the same beam condition at the same beam angle), Purion products enable process control to optimize device performance and yield, at high productivity. The Company sells its products to semiconductor chip manufacturers around the world.