Axcelis Technologies, Inc. announced that it will showcase its Purion and GSD Ovation Series of ion implanters at the SEMICON Japan 2022 exhibition. The conference and exhibition is being held December 14-16, at the Tokyo Big Sight in Tokyo, Japan. Axcelis will be located at Booth #5640.
Semiconductor manufacturers are invited to visit the Axcelis exhibit to learn first-hand about innovative ion implant solutions that deliver significant technology and manufacturing advantages. Purion Power Series - Featuring Axcelis' innovative solution for both silicon and silicon carbide (SiC) processing across the full power device applications space. Purion H Series - Including the new Purion H5, the Purion H200 and the Purion Dragon, all designed to provide a comprehensive solution for high current implants.
Purion XE Series - Including the new Purion XEmax, is the industry leading high energy implant platform, featuring patented Boost Technology, designed for the most advanced image sensor applications up to 15MeV. Purion M Series - Offering the broadest spectrum of mid-current doses available, enabling unparalleled flexibility to meet today's evolving implant requirements. GSD Ovation - Providing the most cost-effective way to extend high current and high energy batch platform capability with the highest reliability, serviceability and lowest CoO.