Axcelis Technologies, Inc. announced that it will showcase its Purion™ and GSD Ovation™ Series of ion implanters at the SEMICON Japan 2022 exhibition. The conference and exhibition is being held December 14-16, at the Tokyo Big Sight in Tokyo, Japan. Axcelis will be located at Booth #5640.

Semiconductor manufacturers are invited to visit the Axcelis exhibit to learn first-hand about innovative ion implant solutions that deliver significant technology and manufacturing advantages. Purion Power Series™ - Featuring Axcelis' innovative solution for both silicon and silicon carbide (SiC) processing across the full power device applications space. Purion H™ Series - Including the new Purion H5™, the Purion H200™ and the Purion Dragon™, all designed to provide a comprehensive solution for high current implants.

Purion XE™ Series - Including the new Purion XEmax™, is the industry leading high energy implant platform, featuring patented Boost Technology™, designed for the most advanced image sensor applications up to 15MeV. Purion M™ Series - Offering the broadest spectrum of mid-current doses available, enabling unparalleled flexibility to meet today's evolving implant requirements. GSD Ovation™ - Providing the most cost-effective way to extend high current and high energy batch platform capability with the highest reliability, serviceability and lowest CoO.