With the Semi Mobility Solution,
With the Wafer Handling Solution,
Semiconductors' performance dictates the pace of innovation. This applies just as much to industrial automation as to digital communication via cell phones, laptops, smart building technology, and the automobile industry. And the market is continuing to grow. In 2018, the international semiconductor industry achieved
The robotics industry is also taking advantage of this trend, as, for example, the latest generation of controls and controllers offer additional functions. Conversely, however, the innovative capacity of robot manufacturers is also accelerating the efficiency and productivity of microprocessor manufacturers.
For example:
Mobile handling system for cleanrooms
Using robotics, individual production steps can be automated very well and to a high-quality standard. However, up until now, robotics have not been used to transporting semiconductor substrates (wafers) from one workstation to the next. Ideally, semi-conductor manufacturers would prefer end-to-end automation, because pristine cleanroom conditions can be much better achieved with "unmanned production." Until now, however, this aspect of the process was untenable due to the lack of precision with which mobile robots move and grasp.
System solution: AGV plus robot arm plus gripper
The Semi Mobility Solution goes to a handover point where wafer transport boxes are located. When the AGV has reached its destination, the robot arm is in place to precisely determine its position with the help of an integrated image processing sensor and performs a fine calibration.
This moves the robot into the position to grasp the transport box with a high degree of accuracy and deposit the sensitive wafers without any vibrations in a storage space on the AGV platform. Using this approach, the robot can pick up and transport two different sizes of boxes for wafers with a diameter of 200 or 300 mm. Once it has reached its destination, the robot puts down the transport boxes on the respective processing line.
The Semi Mobility Solution moves around the room on the basis of stored destinations but chooses the route there itself. The navigational capacity of the LBR iiwa platform enables it to move autonomously in a safe and sensitive way. Environment tracking is supported by laser scanners. They perceive the environment in real time, thus preventing collisions.
The gripping process itself is guided by image processing
The safety-oriented environment recognition also creates the preconditions for being able to use the platform as a cobot (collaborative robot) without a safety fence near the operators. The gripping process itself is guided by image processing. Extremely high precision and reliability are essential in this process, because the wafers are sensitive. Vibrations must be avoided.
Cognex In-Sight 2000 image processing is responsible for the referencing and millimeter-accurate positioning of the gripper
Image processing: High-performance in a compact space
When selecting the image processing system to guide the robot,
In addition,
Important for mobile use: An integrated LED lighting ensures uniform illumination even in changing ambient conditions
Another advantage for the In-Sight 2000: The In-Sight 2000's patent-pending integrated LED lighting provides uniform illumination over the whole image, regardless of the prevailing lighting conditions. This is particularly important in mobile applications because there is not the same lighting everywhere and even the time of day or the season can affect the image quality.
In practice: IP-controlled fine positioning over the last few centimeters
In practice, the Semi Mobility Solution first drives the robot gripper up to the transport box. At this point, the image processing is activated. It recognizes the offset from the destination point stored in the control system and on this basis references the position of the gripper, which can subsequently grasp the respective transport box with the required high degree of millimetric precision. An integrated calibration function guarantees consistently accurate positioning.
Tried-and-tested cooperation between
Cognex supported
Supplying the In-Sight 2000 for the Semi Mobility Solution is not the first collaboration between
About
Cognex is the world's leader in the machine vision industry, having shipped more than 2 million image-based products, representing over
Guptill Janina
Phone : +44 121 296 5163
Janina.Guptill@cognex.com
.
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