Item 5.02. Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers.

(b) On October 1, 2021, Robert A. Koch, Vice President and General Counsel of Onto Innovation Inc. (the "Company"), notified the Company that he intended to retire sometime in 2022. On October 5, 2021, the Company filed a Current Report on 8-K disclosing Mr. Koch's intent to retire from the Company in 2022. On December 20, 2021, Mr. Koch notified the Company that the effective date of his retirement will be January 5, 2022. Mr. Koch's decision to retire was not the result of any disagreement with the Company on any matter relating to its operations, policies or practices.

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