Item 8.01. Other Events.

On January 7, 2021, Onto Innovation Inc. issued a press release announcing that it had acquired Inspectrology, LLC a leading supplier of overlay metrology for controlling lithography and etch processes in the compound semiconductor market.

A copy of the press release is attached hereto as Exhibit 99.1 and incorporated herein by reference.

Item 9.01. Financial Statements and Exhibits.



(d) Exhibits



Exhibit No.   Description of Exhibit

  99.1          Press Release issued January 7, 2021
              Cover Page Interactive Data File (the cover page iXBRL tags are
104           embedded within the Inline XBRL document)

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