STMicroelectronics Establishes World’s First “Lab-in-Fab” to Advance Adoption of Piezoelectric MEMS in
- Collaboration with A*STAR’s
Institute of Microelectronics (IME) and Japanese manufacturing tool vendor ULVAC, focuses on Piezo MEMS technology
- First-of-its-kind concept aims to accelerate the transition from proofs of concept to volume production, and advance the adoption of piezoelectric (
Piezo ) MEMS in new applications like AR/VR, medical, and 3D printing
- First wafers expected in Q2 2021, with volume production forecast at the end of 2022.
The Lab-in-Fab consists of a new cleanroom area within ST’s
“We want to build the world’s leading R&D center for Piezo MEMS materials, technologies, and products with IME and ULVAC, with whom we have been working for a long time. This world first will be hosted in our
This collaboration enhances the existing manufacturing-process portfolio of ST Singapore and will accelerate the adoption of Piezo MEMS actuators in promising new fields of application, including MEMS Mirrors for Smart Glasses, AR Headsets and LIDAR systems, Piezoelectric Micromachined Ultrasonic Transducers (PMUT) for emerging medical applications, and Piezo Heads for Commercial and industrial 3-D Printing.
“The public-private partnership between IME, ST and ULVAC has led to the creation of a unique R&D line, which will bring about novel products using piezo materials, and boost the competitiveness of our partners. These efforts will continue to anchor high-value R&D activities in
“We are proud of being a “Lab-in-Fab” partner of ST and IME in developing advanced Piezo-MEMS for numerous promising future applications. This is also a strong proof of ULVAC’s leadership in providing manufacturing technology solutions to the Piezo-MEMS industry. We are looking forward to working closely with our partners for a successful collaboration,” said Dr. Koukou SUU, Executive Officer and Senior Fellow of ULVAC.
Note to editors
The “Lab-in-Fab” facility comes a year after ST celebrated its 50th anniversary in
About
At ST, we are 46,000 creators and makers of semiconductor technologies mastering the semiconductor supply chain with state-of-the-art manufacturing facilities. An independent device manufacturer, we work with our 100,000 customers and thousands of partners to design and build products, solutions, and ecosystems that address their challenges and opportunities, and the need to support a more sustainable world. Our technologies enable smarter mobility, more efficient power and energy management, and the wide-scale deployment of the Internet of Things and 5G technology. Further information can be found at www.st.com.
About the
About ULVAC
ULVAC, Inc., founded in 1952, contributes to the development of industry through its comprehensive vacuum technologies. We created ULVAC SOLUTIONS based on these unique technologies and long years of research, development and production innovation. We offer these solutions, for equipment, materials, vacuum components, analytic evaluation and various other services, to manufacturers of electronic components, semiconductors, solar cells, flat panel displays and other industrial equipment. For more information, please visit www.ulvac.co.jp/en/.
For Press Information Contact:
Mr.
Manager,
Tel: +65 6216 5598
Email: wddennis.tan@st.com
Ms.
Assistant Head, Corporate Communications, A*STAR
Tel: +65 9825 3600
Email: sumcll@hq.a-star.edu.sg
ULVAC, Inc.
Advanced Electronics Equipment Division
TEL: +81 467 89 2139
Email: elec@ml.ulvac.com
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