Tokyo Electron : Announcement on Changes in Corporate Director, Audit & Supervisory Board Member

March 25, 2021

Name of the Company: Name of the Representative:Tokyo Electron Limited Toshiki Kawai President & CEO (Representative Director)

(Code No.8035; The First Section of the Tokyo Stock Exchange)Person to contact:

Tatsuya Aso

Vice President of Legal Dept. (Tel: [phone])

Announcement on Changes in Corporate Director, Audit & Supervisory Board Member

Tokyo Electron Limited announces that its Board of Directors has decided on the list of candidates for Corporate

Director and Audit & Supervisory Board Member on March 25, 2021. The official resolution on these matters will be made at the Annual General Meeting of Shareholders held on June 17, 2021.

• 1. Twelve Candidates for Corporate Director

  • (1) Reappointed Candidates for Corporate Director

    Tetsuo Tsuneishi

    Toshiki Kawai

    Sadao Sasaki Yoshikazu Nunokawa

    Tatsuya Nagakubo Kiyoshi Sunohara

    Seisu Ikeda Yoshinobu Mitano

    Charles Ditmars Lake II (Outside Director) Michio Sasaki (Outside Director)

    Makiko Eda (Outside Director)

  • (2) Newly Appointed Candidate for Corporate Director Sachiko Ichikawa (Outside Director)

  (currently Partner, Tanabe & Partners Law Office)

• 2. One Candidate for Audit & Supervisory Board Member

  Reappointed Candidate for Audit & Supervisory Board Member

Kyosuke Wagai (Outside Audit & Supervisory Board Member )

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