Company TSUKUBASEIKO Co.,Ltd.

TSUKUBASEIKO Co,.Ltd. is mainly engaged in the development, manufacture and sale of electrostatic chucks. The electrostatic chucks generate high adsorption power at low voltage and realize cordless and thin Carrier type electrostatic chucks. The Company's products include supporters, stages and others. The supporters is a system of electrostatic chuck which can maintain adsorption power for a long time even if it is separated from a power supply unit, and generate adsorption by using power supply units when adsorbing the materials. The stages is a system of electrostatic chuck to which a power supply unit belongs, supplies power when adsorbing the materials and stops power supply when releasing the material to be attracted. The other products include small electrostatic chucks, including other applied products of electrostatic chucks, embedded in handling materials for semiconductor wafers.