Axcelis Technologies, Inc. announced shipments of the Purion XE high energy and the Purion H high current implanters to multiple fabs in Korea and China to manufacture DRAM memory devices. The systems include a follow-on shipment to an existing customer in Korea, and the penetration of a new customer in China. The systems shipped in the fourth quarter of 2023.
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- Axcelis Announces Shipments of Purion XE High Energy and Purion H High Current Implanters to DRAM Memory Chipmakers